以快速發表重要成果為特色，微系統技術研究了機電、材料、設計和微系統及其組件的制造問題。它集成了許多領域的學術和工業專家的知識、經驗和能力。此外，它有助于生產可靠、高性能的微機電系統和信息存儲和處理系統的經濟和生態健全。該雜志涵蓋了MEMS/NEMS地址傳感器、執行器、其他微/納米系統以及微機電一體化系統。信息存儲系統的覆蓋范圍包括磁記錄、光學記錄和其他記錄設備。最后，在處理系統的分類下，該雜志探討了復印機、打印機、掃描儀和數碼相機。

Featuring rapid publication of important results, Microsystem Technologies examines electromechanical, materials, design, and manufacturing issues of microsystems and their components. It integrates the knowledge, experience, and capabilities of academic and industrial specialists in many fields. Moreover, it contributes to the economically and ecologically sound production of reliable, high performance MEMS and information storage and processing systems. The journal’s coverage of MEMS/NEMS addresses sensors, actuators, and other micro/nanosystems as well as micromechatronic systems integration. Coverage of information storage systems includes magnetic recording, optical recording, and other recording devices. Lastly, under the category of processing systems, the journal explores copiers, printers, scanners, and digital cameras.